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<p style="line-height: 1.5em;"><span style="font-size: 16px;"><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">*</span><span style="font-size: 13px; font-family: 宋體; color: black;">分辨率為</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">0.1/0.5μm</span><span style="font-size: 13px; font-family: 宋體; color: black;">時，精度可高達</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">(1.3+0.6L/600)μm</span><span style="font-size: 13px; font-family: 宋體; color: black;">；</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;"> <br/> *</span><span style="font-size: 13px; font-family: 宋體; color: black;">確保垂直度（前部）達</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">6μm</span><span style="font-size: 13px; font-family: 宋體; color: black;">，直線度達</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">4μm</span><span style="font-size: 13px; font-family: 宋體; color: black;">；</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;"> <br/> *</span><span style="font-size: 13px; font-family: 宋體; color: black;">全</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">/</span><span style="font-size: 13px; font-family: 宋體; color: black;">半空氣浮動系統(tǒng)可調(diào)節(jié)氣墊；</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;"> <br/> *GO/NO-GO LED</span><span style="font-size: 13px; font-family: 宋體; color: black;">顯示</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">. <br/> *</span><span style="font-size: 13px; font-family: 宋體; color: black;">帶有基本統(tǒng)計功能，另外，通過</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">RS-232C</span><span style="font-size: 13px; font-family: 宋體; color: black;">數(shù)據(jù)輸出與帶有</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">SPC</span><span style="font-size: 13px; font-family: 宋體; color: black;">軟件的電腦相連，</span><span style="font-size: 13px; font-family: 宋體; color: black;">可實現(xiàn)外部測量數(shù)據(jù)評估；</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;"> <br/> *</span><span style="font-size: 13px; font-family: 宋體; color: black;">大容量數(shù)據(jù)存儲，可儲存</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">50</span><span style="font-size: 13px; font-family: 宋體; color: black;">個測量程序和</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;">60000</span><span style="font-size: 13px; font-family: 宋體; color: black;">個測量結(jié)果</span><span style="font-size: 13px; font-family: Verdana, sans-serif; color: black;"> </span></span></p>

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